ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
First, product introduction
1.Separate design, easy to move quickly
2.Wide detection range, large and small leakage can be detected
3.Leak detection port high pressure resistance, wide range of adaptation
4.Full LCD touch color screen
5.Leak detection state zero clear with one key
6.English and Chinese menu interface
7.The vacuum pump is easy to maintain
8.Long warranty of core parts.
ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
Two, the main technical indicators
| Minimum detectable leakage rate |
5×10-13Pa·m3/s |
Leakage rate display range |
1×10-2 -- 1×10-13Pa·m3/s |
| Startup time |
≤3 minutes |
Response time |
≤1.0s |
| Maximum pressure of leak detection port |
1500Pa |
Ultimate pressure |
5×10-4Pa |
| Mechanical pump pumping speed |
3L/s |
Power supply requirements |
220V, 50Hz, single-phase, 10A |
| Working environment |
5-35ºC |
Relative humidity |
≤80% |
| Overall size |
550 (W) ×420 (D) ×900 (H) |
Weight |
70kg |
ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
First, product introduction
1.Separate design, easy to move quickly
2.Wide detection range, large and small leakage can be detected
3.Leak detection port high pressure resistance, wide range of adaptation
4.Full LCD touch color screen
5.Leak detection state zero clear with one key
6.English and Chinese menu interface
7.The vacuum pump is easy to maintain
8.Long warranty of core parts.
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