Customization: | Available |
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After-sales Service: | 1year |
Warranty: | 1year |
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Power system | radio-frequency power supply |
medium-frequency power supply | |
power | 0~600W | 0~2000W | |
frequency | 13.56MHz | 40KHz | |
Vacuum plant |
Double-stage vane pump (oil pump) |
60m3/h |
|
vacuum line |
All stainless steel piping and high strength vacuum bellows | ||
texture | Aluminum alloy (customizable stainless steel cavity) | ||
thickness | 25mm | ||
leakproofness | grade welding seal | ||
Cavity internal dimensions | 4450×450×500mm (width × height × depth) |
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Effective size of electrode plate |
420×411mm(width × depth) | ||
Available space spacing | 22.5mm | ||
Electrode layout |
Horizontal arrangement, activity extraction |
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Work tray | Standard one set, material optional (aluminum, steel wire mesh) | ||
work space |
8 layer | ||
Gas system | flow range | 0~300SCCM | |
Process gas path | Standard with two, can be customized | ||
Control system | systems control | PLC | |
delivery method | 7 inch touch screen | ||
Other parameters | boundary dimension | 900×1750×1000mm(w×h×d) | |
weight | 200KG | ||
Equipment appearance color | silver gray |
Factory specifications | |
Ac power specification |
Power supply:AC380V,50/60Hz,5wire,50A |
Factory exhaust |
Flow:2.0 m³/min |
Gas requirements for plant work |
Flow:1~10 L/min Pressure:3~7 kg/cm² Pipe diameter:6×4 mm Texture:PU pipe Purity:More than 99.99% |
Factory compressed air requirements |
Flow:1~10 L/min Pressure:3~7 kg/cm² Pipe diameter:8×5 mm Texture:PUpipe Dew point:-40ºC under Particle>0.3μm:10Pcs/ft³ |
General requirements | |
Risk identification | High pressure hazard identification |
Service environment | temperature:15~30ºC humidity:30~70% |
Other matters needing attention | No combustible gases, corrosive gases, explosions or reactive dust Gas cylinders need to be fixed |
Configuration list | |||||
Serial Number | Name | description | unit | quantity | |
1 | Main engine | boundary dimension:900×1750×1000mm (width × height × depth) |
Pc | 1 | |
2 | Love sincerely |
Aluminum alloy vacuum chamber inside dimension 450×450×500mm (width × height × depth) |
Pc |
1 | |
3 | Excitation power supply | radio-frequency power supply |
edium-frequency power supply | Set | 1 |
frequency:13.56MHz; Power 0 ~ 600 w Or 0~1000W is optional; Fully automatic vacuum capacitor matching unit |
frequency:40KHz; 0~1000W; |
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4 | PLC | Siemens,S7-200 | Pc |
1 | |
5 | Touch screen |
Wei lun tong,7 inch screen,MT6071iE | Pc |
1 | |
6 | Flowmeter | British wawick brand | Pc | 2 | |
7 | Vacuum pump | Flyover double-stage vane pump (oil pump):60m3/h | Pc |
1 | |
8 | Vacuum gauge |
The fu kang | Pc |
1 | |
9 | Specification | Vacuum plasma cleaning machine spv-100 operation manual | Pc |
1 |
Maintaining | |||
Project | Examination content | Lifetime | frequency of inspection |
Oil pump | Filter element | Hours of use 2000H | 15 days |
Pump oil | Hours of use2000H | 15 days |