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10L Small Laboratory Vacuum Plasma Cleaning Machine Plasma surface treatment systems Plasma Cleaner
Equipment introduction: It is composed of ion power supply, vacuum system, gas filling system, automatic control system and other parts. The basic principle of work is that in a vacuum state, the plasma can ionize the gas under controlled and qualitative methods. The vacuum pump is used to evacuate the studio to a vacuum of 10-100pa, and then the gas is ionized under the action of a high-frequency generator. , The formation of plasma (the fourth state of matter), its notable feature is the high uniformity of the knife glow discharge, according to different gases emit colored visible light from blue to deep purple, the material processing temperature is close to room temperature. These highly active particles interact with the treated surface to obtain various surface modifications such as surface hydrophilicity, water repellency, low friction, high cleaning, activation, and etching.
10L Small Laboratory Vacuum Plasma Cleaning Machine Plasma surface treatment systems Plasma Cleaner
Advantages of plasma treatment:
1. Environmental protection technology: The plasma action process is a gas-solid phase coherent reaction, which does not consume water resources, does not need to add chemicals, and does not pollute the environment.
2. Versatility: regardless of the type of substrate to be processed, it can be processed, such as metals, semiconductors, oxides and most polymer materials can be processed well;
3. Low temperature: close to normal temperature, especially suitable for polymer materials, longer storage time and higher surface tension than corona and flame methods.
4. Strong function: only involving the shallow surface of polymer material (10 -1000A), which can give one or more new functions while maintaining the material's own characteristics;
5. Low cost: The device is simple, easy to operate and maintain, and can be operated continuously. Often a few bottles of gas can replace thousands of kilograms of cleaning fluid, so the cleaning cost will be much lower than wet cleaning.
6. Controllable process in the whole process: All parameters can be set by computer and recorded in data for process quality control.
7. There are no restrictions on the geometry of the processed objects: large or small, simple or complex, parts or textiles can be processed.
10L Small Laboratory Vacuum Plasma Cleaning Machine Plasma surface treatment systems Plasma Cleaner
1. The basic structure of a small plasma cleaning machine
1. Radio frequency power supply part: radio frequency source, radio frequency adjustment, power amplification, power adjustment, power output, output protection, plasma electrode, temperature protection.
2. System control part: digital automatic control, I/O control, vacuum A/D detection, pulse width ratio D/A adjustment, parameter memory, clock setting.
3. Vacuum and gas path: vacuum system, additional gas, flow adjustment, return gas and pipeline
For small plasma cleaners, due to the low RF power, the RF power supply and control are assembled in a chassis. One is to reduce space occupation, and the other is to facilitate operation and placement. At the same time, compared with large-scale cleaning machines, from the detection The settings of functions and control functions are as concise as possible. Figure 1 shows the appearance of the minicomputer.
The overall appearance treatment process, the rack door panel paint, durable, scratch-resistant, aluminum alloy automatic door: oxidation treatment, sandblasting, smooth and high-grade, the stainless steel cavity internal surface treatment is bright, easy to clean, circuit design, current overload protection, modular circuit, Maintenance is convenient and quick, PLC man-machine interface, convenient, concise, precise timing, manual, automatic, and vacuum pressure holding can be operated, tumbler rubber foot cup, automatic balance machine, shock absorption,
Figure 4. Plasma cleaning machine (man-machine interface)
2. Working process and technical conditions of small plasma cleaning machine
Under the condition of meeting the set vacuum, the system starts the radio frequency source to work and generates 40KHz radio frequency pulses, which are sent to the output stage after power amplification. The output stage has three functions: one is isolation, the other is boosting, and the third is matching. Make a radio frequency pulse with sufficient energy to excite the high-voltage plate to generate plasma.
3. General technical parameters of the equipment
Cavity material: stainless steel surface treatment Power supply: AC220V Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump) Plasma power: 0-300W adjustable RF frequency: 40KHz (offset less than 0.2KHz) Frequency offset: less than 0.2KHz Characteristic impedance: 50 ohms, automatic matching Vacuum: 1pa-100Pa (quantified value display of pressure gauge) Number of gas channels: two-way gas Gas flow rate: 10-160ml/min (adjustable) Process control: PLC man-machine interface automatic and manual mode Cleaning time: 1-9999 seconds adjustable Power size 10%-100% adjustable Inner cavity size 220mm W x 200mm H x 260mm L Dimensions: 650mm W x 420mm H x 600mm L Weight: 130Kg Vacuum pump: VRD-8 Vacuum chamber temperature: less than 60°C Cooling method: forced air cooling
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